5 -Thin-film and thick-film technologies

5.1 - Thin-film technology

Floor-plan of the thin-film laboratory
Electron beam evaporation
AlphaStep surface profiler
The stylus, which has physical contact with the surface, ends in a globe with a diameter of 12.5 µm. The angle of the tip is 60°. This also causes a problem, that can be observed by pressing MAGNIFIER. Please note that the stylus, the measured surface and the displayed trace are not shown in their real size, range and aspect ratio.

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