INTRODUCTION
SENSORS
MEMS
1 Introduction
2 Technologies
3 Structures
4 Effects
5 Measuring parameters
6 Application
6.1 Industrial
6.2 Automotive
6.3 Environment
6.4 Biomedical
6.5 Comfort
6.6 Safety
6.7 Household
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6 - Application of sensors
6.5 - Comfort
Air quality sensors and control
Room lightning
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