1 - Introduction
1.1 Course overview and Outcome
Course overview and Outcome This MEMS course emphasizes theoretical and practical information for the successful design, production and application of Micro Electro-Mechanical System (MEMS) in the practice. After a short introduction with a summary of the basic definitions, the user can begin with a brief overview of three fundamental areas: technologies, mechanical structures, and operation principles of various structures. Than the applications of the various MEMS types are described. The viewer will find a strong emphasis not only on "what" and "how" but also on "why". The latest developments in materials, structures and application possibilities are also discussed. The user can learn:
- Which MEMS types are most appropriate for a given application?
- What kind of requirements should be fulfilled at the particular application?
- How the structures can be connected and operated in various application fields?
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