1 - Introduction

Course overview and Outcome This MEMS course emphasizes theoretical and practical information for the successful design, production and application of Micro Electro-Mechanical System (MEMS) in the practice. After a short introduction with a summary of the basic definitions, the user can begin with a brief overview of three fundamental areas: technologies, mechanical structures, and operation principles of various structures. Than the applications of the various MEMS types are described. The viewer will find a strong emphasis not only on "what" and "how" but also on "why". The latest developments in materials, structures and application possibilities are also discussed. The user can learn:

• Which MEMS types are most appropriate for a given application?
• What kind of requirements should be fulfilled at the particular application?
• How the structures can be connected and operated in various application fields?

The course provides the participants with an overview of MEMS, i.e. miniature devices for measuring and actuating physical and chemical quantities such as pressure, acceleration, speed chemical concentration, etc. Micro Electro-Mechanical Systems fabricated by different technologies, from silicon, ceramics, thin and thick films, polymer films, by optical fibre technology are described and characterized. The different MEMS structures in use, the most important sensing effect, as well as, the principles of sensing and actuating various parameters are presented. The overview of application fields includes automotive, informatics and consumer case studies, with a special focus on biomedical applications.