2 - Technologies

SCREAM (Single Crystal Reactive Etching and Metallisation) technology uses both isotropic and anisotropic etching and multiple masking to build bulk micromechanical structures. Surface SiO₂ mask defines the pattern of structures and after the first anisotropic etching process, the bulk SiO₂ mask protect the structure walls. The following anisotropic and isotropic etchings release the micromechanical structure.