5 - MEMS devices

Positioning the glass fibers on photonic chip with the use of V-grooves.

Microlenses, micro lens arrays and static mircomirrors could be fabricated in borosilicate glass.

• Refractive microlenses
• Microlens arrays
• Cylincdrical lenses
• Elliptical lenses
• Micromirrors

Cross-connection in optical domain is a key function in most optical telecommunication systems. In optical systems, digital cross-connect (DXC) is capable of interconnecting thousands of inputs with thousands of outputs. An optical switch is a device in which the mirror may let an optical beam to pass through the system or may reflect it in a different direction. The mirror can be actuated with a comb-drive.

2D waveguide switch: a pop-up micromirror array acts as an N-port switch where the mirrors are actuated by electrostatic or magnetic fields.

One axis two state micromirrors and digital micromirror arrays (DMAs) are used in media projectors. 1, 2 or 3 DMA chip reflects in RGB colours.
Two axis digital micromirrors are widely used in media projectors, retina scanning technology and in light-beam switching technology.

Silicon micromirror type 1: Bistable (dark/light) micromirror element, that reflects the light beam focused on it.

Silicon micromirror type 2: Multistable (grayscale) micromirror element.