4 3D structures

An example for interdigital structure is shown on this animation. The resonator is made of three electrodes: a resonant plate, and two electrostatic comb drives. The resonant structure is suspended by folded beams attached to the anchors. The fingers of the resonant plate are placed between the finger of comb drives. The comb drives are used for driving or sensing. When the electrode is excited, it moves in a lateral direction, causing change in comb capacitance.