3 - Packaging related technologies
3.4 LTCC in MEMS packaging
LTCC technology
LTTC - Low Temperature Co-fired Ceramics (or MLGC: MultiLayer Glass Ceramics) - is made of raw ceramics material, called Green TapeTM. First, via holes are punched into the substrate and filled with conductor paste. Then the conductor layers are screen-printed onto the surface. The other ceramic layers are prepared the same way.
After drying each layer, they were pressed together to build a packet. The packet is then cured on elevated temperature (850O°C), this process is called co-firing. Last, the outer conductors are screen-printed onto the blank side of co-fired substrate.
After drying each layer, they were pressed together to build a packet. The packet is then cured on elevated temperature (850O°C), this process is called co-firing. Last, the outer conductors are screen-printed onto the blank side of co-fired substrate.
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