4 3D structures

Silicon etching rate in KOH will be reduced by several orders of magnitude p/type etch stop layer is reached. Applying etch stop techniques, thin membranes suspended by a silicon frame can be etched. The shape of the cavity is fracture of pyramid.

In the field of microfluidics different kind of channels are realized by MESA MEMS technologies. Porous membranes in a semicircular channel are used for separating macromolecules. Buried Si3N4 channels shown in this animation, are widely used for fluidic transporting channels in Lab-on-a-chip applications.

In some biomedical application the electrode-skin isolating impedance due to the isolating characteristics of the outer skin layer could be eliminated stabbed by micro-needle arrays based on MEMS technology.