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1 - Introduction

1.5 - Smart sensors

Smart sensors
The rapid development of microelectronics, micromechanics, integrated optics, and other related high technologies enabled the miniaturization of sensor elements, as well as the physical integration of various functions and signal-processing elements onto the same substrate. Sensor arrays are integrated sensors consisting of the same or similar sensor units with the same or similar function. Multisensors consist of several sensor elements, each having different function. A multifunction sensor is a single device that can realize several different sensor functions under different conditions. There are several possible levels when integrating signal-conditioning units with sensors. The first level of signal conditioning that can be integrated on a sensor chip is balancing the offset, compensating the temperature drift, and so on. Higher level of integration may include amplification and signal conversion. The third level, which is the visible technology trend of smart sensors, is the incorporation of microprocessor and memory for performing different intelligent functions at the sensor level, such as:
  • digital signal processing and storage,
  • compensation of static errors,
  • self-calibration and testing,
  • automatic switching of the measurement ranges,
  • recording of the measured data,
  • calculation of mean values, tolerances, etc.,
  • possibility of multisensor signal processing,
  • compensation of time-dependent instabilities.




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